Exponential Expansion for Rapid and Accurate Extraction of Interconnect Capacitance
نویسندگان
چکیده
We report a new approach for efficient computation of capacitance in multiconductor systems embedded in homogeneous or multiple dielectric media. The technique employs exponential expansion of the Green's function for evaluation of the three-dimensional potential and its gradient, enabling rapid and accurate extraction of interconnect capacitance in VLSI and large-area amorphous silicon electronics. Additionally, it can be used for analysis of electrostatic interaction in micro-electro-mechanical systems (MEMS).
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